Maricopa Community Colleges  ELE286   19992-19992 
Official Course Description:   MCCCD Approval:  11/24/98  
ELE286      19992-19992 L+L 4 Credit(s) 6 Period(s)
Introduction to Monolithic Integrated Circuit Devices
Physics and electronics of bipolar and MOS devices used in integrated circuits. Laboratory experience in integrated circuit fabrication. Prerequisites: ELE231.
Cross-References:   SMT286
 
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MCCCD Official Course Competencies:
 
ELE286   19992-19992 Introduction to Monolithic Integrated Circuit Devices
1. Explain historical and current contexts for the principles and applications of integrated circuits. (I)
2. Work effectively in collaborative groups. (I, II, III)
3. Demonstrate appropriate semiconductor fabrication environment behavior in terms of safety, particle and defect reduction, and wafer handling. (I, II, III)
4. Fabricate functional integrated circuits. (II)
5. Measure oxide thickness, critical dimensions, and electrical characteristics of integrated circuits. (III)
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MCCCD Official Course Outline:
 
ELE286   19992-19992 Introduction to Monolithic Integrated Circuit Devices
    I. Introduction to Integrated Circuits
        A. Integrated circuit (IC) history
        B. IC applications
        C. Bipolar/MOS device physics
        D. IC fabrication process flow
      II. Integrated Circuit Fabrication
          A. Crystal growth and doping
          B. Oxidation
          C. Diffusion
          D. Epitaxy
          E. Ion implantation
          F. Metalization
          G. Photolithography
        III. Integrated Circuit Testing and Characterization
            A. Oxide thickness
            B. Critical dimensions
            C. Electrical characterization
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