Maricopa Community Colleges  DFT246   19962-20086 
Official Course Description: MCCCD Approval: 07/22/08
DFT246 19962-20086 L+L 3 Credit(s) 4 Period(s)
Integrated Circuit Photolithography
Theory of the fundamentals of photolithography as related to the manufacturing process of integrated circuits.
Prerequisites: CHM130 or equivalent. Corequisites: DFT245AA
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MCCCD Official Course Competencies:
 
DFT246   19962-20086 Integrated Circuit Photolithography
1. Describe the alignment and exposure process including development and inspection. (I)
2. Describe the differences between various crystal structures. (II)
3. Describe the chemical vapor deposition process. (III)
4. Contrast bipolar and MOS transistors, (IV)
5. List the five steps of diffusion. (V)
6. Describe the purposes of the epitaxial layers, the steps of its growth, and characteristics used to evaluate it. (VI)
7. Explain the purpose, process, and effect of ion implantation. (VII)
8. Define regions and functions and their electrical functions. (VIII)
9. Describe metalization, including its purpose, selection criteria, and deposition methods. (IX)
10. Describe the purpose and basic steps of photolithography. (X)
11. List two types of photoresist and their performance factors. (XI)
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MCCCD Official Course Outline:
 
DFT246   19962-20086 Integrated Circuit Photolithography
    I. Alignment and Exposure
        A. Mask making
        B. Aligners and alignment
        C. Exposure
        D. E-beam printing and other methods
        E. Development and after-development inspection
      II. Crystal Structures
          A. Polycrystalline vs. single crystal arrangements
          B. Wafer preparation
        III. Chemical Vapor Deposition
            A. Deposition vs. oxidation
            B. Two deposition approaches
            C. CVD (Chemical Vapor Deposition) equipment
            D. LVCVD (Low Volume Chemical Vapor Deposition) equipment
          IV. Bipolar and MOS Transistor
              A. Bipolar transistor
              B. MOS (Metal Oxide Silicon) transistor
            V. Diffusion
                A. Definition
                B. Two types of diffusion
                C. Five steps in diffusion
              VI. Epitaxial Growth
                  A. Definition
                  B. Growing and epitaxial layer
                  C. Equipment used
                  D. Evaluating the epitaxial layer
                VII. Ion Implantation
                    A. Definition
                    B. Masking
                    C. Channeling
                    D. Equipment
                    E. Ion dose/profile
                  VIII. Regions and Junctions
                      A. Definition
                      B. Functions
                    IX. Metallization
                        A. Material
                        B. Two methods: Evaporation and sputtering
                        C. Equipment
                        D. Step coverage
                        E. Process steps
                      X. Photolithography
                          A. The challenge
                          B. Photo-mask
                          C. Patterning and etching
                          D. Ten basic steps
                        XI. Photo resists
                            A. Negative photoresist
                            B. Positive photeresist
                            C. Polymers
                            D. Solubility
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