Maricopa Community Colleges  GTC207   19936-20086 
Official Course Description: MCCCD Approval: 05/25/93
GTC207 19936-20086 LEC 2 Credit(s) 2 Period(s)
High-Vacuum Technology
Basic theory and practice of high-vacuum systems used in microelectronics processing. Includes vacuum pumps, seals, gauges, valves, power supplies, leak-detecting equipment, and related hardware.
Prerequisites: GTC133 or permission of Department or Division.
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MCCCD Official Course Competencies:
 
GTC207   19936-20086 High-Vacuum Technology
1. Describe the sublimation principle as applied to selection of materials for a vacuum system. (I)
2. Explain the effects of temperature and water vapor on vacuum systems. (I)
3. Compare and contrast ideal and actual vacuum. (I)
4. Define the pressure measurement units used in vacuum systems. (II)
5. Apply the basic properties of gases including pressure, volume, temperature, and mass, to apply Dalton's, Boyle's, and Avogadro's laws to high-vacuum systems. (III)
6. Define the terms outgassing, real leaks, and virtual leaks, and describe techniques for identifying each in a system that fails a leaktest. (VI)
7. Explain how the properties of gases are used in thermal conductivity, electrical conductivity, and ionization probability gauges. (V)
8. List the gauges used in vacuum measurements and describe the principles of operation of each. (V)
9. Describe the theory of operation, pressure range, and applications of roughing pumps and high-vacuum pumps. (VI)
10. List the types of vacuum valves and describe mode of operation and practical applications in vacuum systems. (VII)
11. Describe the materials used in seals for high-vacuum systems, list practical applications, and explain advantage and disadvantages of each seal type. (VII)
12. Compare and contrast the types of feedthroughs used in high-vacuum systems. (VII)
13. Describe the important properties of the alloys and pure metals used in vacuum systems. (VIII)
14. Compare and contrast the joining methods used in vacuum systems and list and describe the types and properties of joining materials. (VIII)
15. Describe a breakdown technique that accounts for subsystem interface, effects of gas loading conductance, cleanliness, and documentation. (IX)
16. List the chemical, electrical, pressure and mechanical hazards encountered in the maintenance of high-vacuum systems and describe techniques for avoiding these hazards. (X)
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MCCCD Official Course Outline:
 
GTC207   19936-20086 High-Vacuum Technology
    I. Basic concepts of vacuum systems
        A. Temperature effects
        B. Sublimation and vacuum system materials
        C. Water vapor effects in vacuum systems
        D. Ideal and actual vacuum
      II. Pressure
          A. Definition
          B. Vacuum system measurement units
            1. Torr
            2. Millitorr
            3. Micron
            4. Newton
            5. Pascal
            6. Bar
            7. Millibar
          C. Pressure unit conversions
          D. Vacuum categories
            1. Rough
            2. Medium
            3. High
            4. Ultrahigh
        III. Gases
            A. Properties
              1. Pressure
              2. Volume
              3. Temperature
              4. Mass
            B. Laws
              1. Dalton's
              2. Charles'
              3. Boyle's
              4. Avogadro's
          IV. Vacuum system leaks
              A. Outgassing
              B. Real leaks
              C. Virtual leaks
              D. Identification
            V. Vacuum gauges - properties of gases
                A. Measurement techniques
                  1. Absolute
                  2. Indirect
                B. Types/operations
                  1. Bourdon
                  2. Capacitance manometer
                  3. Thermocouple
                  4. Pirani
                  5. McLeod
                  6. Thermal ionization
                  7. Penning
              VI. Vacuum Pumps - operation/range/applications
                  A. Roughing
                    1. Rotary vane
                    2. Rotary piston
                    3. Roots blower
                    4. Venturi
                    5. Adsorption
                  B. High-vacuum
                    1. Cryotrap
                    2. Cyropump
                    3. Diffusion
                    4. Turbomolecular
                VII. Valves, seals, and feedthroughs
                    A. Definitions
                    B. Valves types - operation/materials
                      1. Sliding gate
                      2. Swing gate
                      3. Metal seal
                      4. Bellows seal
                      5. Nupro tee shut-off
                      6. Nupro air-activiated
                      7. Needle
                      8. Tylan mass flowmeters and controllers
                      9. Brooks flow solenoid
                      10. Throttle
                      11. Practical application
                      12. Advantages/disadvantages
                    C. Seal types - operation/materials
                      1. O-ring
                      2. Conflat flange
                      3. VCR connection
                      4. Swagelok tube fitting
                      5. K-flange
                      6. Ultra-torr fitting
                      7. Large-flange
                      8. Practical application
                      9. Advantages/disadvantages
                    D. Feedthrough types - operation/materials/comparison
                      1. Linear-motion bellows
                      2. Differentially - pumped
                      3. Ferro-fluidic
                      4. Electrical
                      5. Optical
                      6. Practical application
                      7. Advantages/disadvantages
                  VIII. Vacuum systems materials - alloys and pure metals
                      A. Properties
                      B. Joining methods
                        1. Soldering
                        2. Welding
                        3. Metal-metal seals
                        4. Glass-metal joints
                        5. Ceramic-metal joints
                        6. Joining materials
                        7. Comparison
                    IX. Maintenance techniques
                        A. Subsystem interface
                        B. Gas-loading effects
                        C. Conductance
                        D. Cleanliness
                        E. Documentation
                      X. Safety
                          A. Hazards
                            1. Chemical
                            2. Electrical
                            3. Pressure
                            4. Mechanical
                          B. Safety techniques
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