Maricopa Community Colleges  GTC204   19936-20086 
Official Course Description: MCCCD Approval: 07/22/08
GTC204 19936-20086 LEC 4 Credit(s) 4 Period(s)
Process Technology Overview
Overview of process technology and equipment used in manufacturing integrated circuits. Includes oxidation, diffusion, ion implantation,thin films, photolithography, etching and process/device simulation.
Prerequisites: (GTC133 and CHM130 and CHM130LL) or permission of Department or Division.
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MCCCD Official Course Competencies:
 
GTC204   19936-20086 Process Technology Overview
1. Describe the construction and basic electrical operation of semiconductor junctions in diode and transistor applications. (I)
2. Describe and compare the process flows for HMOS1 and NMOS devices. (I)
3. Explain the importance of dimensional and performance scaling and the impact of defects on die yield. (I)
4. Describe the principal uses of an oxide layer in semiconductor devices and the major oxidation methods used. (II)
5. List the physical factors that affect the growth rate of oxide layers and describe methods for measuring and controlling the oxide thickness and quality. (II)
6. List diffusion dopant sources and methods of introduction and describe crystal lattice defects. (III)
7. Describe resistivity measurement techniques and the advantages and disadvantages of each. (III)
8. Identify the major components of an ion implanter system and describe the functions of each. (IV)
9. Compare and contrast low-, medium-, and high-current ion implanters with respect to dose range, beam current, energy range, through-put, and scan type. (IV)
10. List the types of thin-film dielectrics and conductors and describe the appliction of each type in device physics. (V)
11. Describe the chemical vapor deposition (CVD) process and its application to thin-film processing. (V)
12. List the major steps in the photomasking process. (VI)
13. Describe the chemistry of positive photoresist processing. (VI)
14. Explain the wet and dry etching methods and the relative merits of each. (VII)
15. Explain the significance of process/device simulation, and describe simulation techniques and the types of problems they are designed to resolve. (VIII)
16. Describe a typical process flow for fabricating an integrated circuit device. (IX)
17. List manufacturing indictors of success in device processing. (IX)
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MCCCD Official Course Outline:
 
GTC204   19936-20086 Process Technology Overview
    I. Introduction to semiconductor devices
        A. P-N junctions
          1. Crystal lattic
          2. Diode with forward and reverse bias
        B. Transistor operational modes
          1. Enhancement
          2. Depletion
        C. Metal oxide semiconductors (MDS) process flow
          1. HMOS1
          2. NMOS
        D. MOSFET memory cells
        E. Die yield effects
          1. Dimensional scaling
          2. Performance scaling
      II. Oxidation
          A. Silicon wafer manufacturing methods
          B. Oxidation methods
            1. Wet
            2. Dry
          C. Effects and limits of oxidation rate on thermal oxides
          D. Physical factors affecting growth rate
          E. Oxide thickness measurement methods
          F. Types of oxide charges
          G. Oxidation processing
            1. Problems
            2. Problem control
        III. Diffusion
            A. Fick's First Law
            B. Crystal lattic defects
              1. Crystal
              2. Three-point
            C. Dopants
              1. Sources
              2. Methods of introduction
            D. Resistivity measurement techniques
              1. Advantages
              2. Disadvantages
            E. Diffusion processing problems
          IV. Ion implantation
              A. Equipment - functions
                1. Vacuum system
                2. Ion sources
                3. Ion controllers
                4. Wafer processing mechanisms
              B. High-, medium-, and low-current implanter considerations
                1. Dose range
                2. Beam current
                3. Energy range
                4. Through-put
                5. Scan type
              C. Ion channeling
              D. Ion stopping mechanisms
              E. Implant damage
            V. Thin films
                A. Types and applications
                  1. Dielectric films
                  2. Conductive films
                B. Chemical vapor deposition (CVD)
                  1. Chemical reactions
                  2. Processing problems
                  3. Plasma enhancing
              VI. Photolithography
                  A. Photomasking process steps
                  B. Photoresist chemistry
                    1. Nagative
                    2. Positive
                  C. Limitations of the masking process
                  D. Critical dimensions
                VII. Etching
                    A. Etching methods/merits
                      1. Wet
                      2. Dry
                    B. Photoresist stripping methods
                      1. Chemical
                      2. Dry
                  VIII. Process/device simulation
                      A. Theory
                      B. Simulation techniques/problems
                    IX. Manufacturing and technology trends
                        A. Process flow for an integrated device
                        B. Manufacturing indicators of success
                        C. Major trends for manufacturing processes
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