Maricopa Community Colleges  GTC202   19936-20086 
Official Course Description: MCCCD Approval: 07/22/08
GTC202 19936-20086 L+L 3 Credit(s) 4 Period(s)
Radio Frequency Energy
Theory and application of radio-frequency (RF) plasma systems for etching, sputtering and deposition operations. Troubleshooting, adjustment, and repair of plasma systems.
Prerequisites: GTC133 or permission of Department or Division.
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MCCCD Official Course Competencies:
 
GTC202   19936-20086 Radio Frequency Energy
1. Perform calculations to analyze the voltage-current relationships in basic series and parallel RLC circuits. (I)
2. Describe the operation of the basic non-resonant filters and list applications for each. (II)
3. Explain the operating characteristics of series-resonant and parallel-resonant filters and compare applications for each. (II)
4. Explain the operation of the basic types of amplifiers and list typical applications for each. (III)
5. Describe and compare the basic amplifier-coupling methods. (III)
6. Draw a typical RF plasma functional block diagram and describe the purpose of each block. (IV)
7. Describe glow-, DC-, and RF- discharge plasma systems and explain the creation and control of a plasma sheath. (V)
8. State the theory and describe the requirements of etch, sputter, and plasma-enhanced chemical vapor deposition (PECVD) plasma systems. (VI)
9. Describe the dangers to humans from RF circuits and describe the safety precautions that should be taken. (VII)
10. Explain the operating principles of the functional parts of an RF power supply. (VIII)
11. Explain the purposes and describe the applications of the basic impedance-matching configurations. (IX)
12. List RF power types and describe measurement techniques and measuring instruments. (X)
13. Describe the properties of coaxial transmission lines and waveguides with respect to frequency and power-handling capabilities. (XI)
14. Given an operating plasma system and measurement instruments, manually strike a plasma, diagnose problems and repair, adjust, or replace components as required. (XII)
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MCCCD Official Course Outline:
 
GTC202   19936-20086 Radio Frequency Energy
    I. Basic electronic component behavior in direct-current and alternating-current circuits
        A. Resistors
        B. Inductors
        C. Capacitors
        D. Calculations
      II. Filtering and resonance
          A. Non-resonant filters - operation
            1. Low-pass
            2. High-pass
            3. Band-pass
            4. Band-stop
            5. Applications
          B. Resonant filters - operation
            1. Series
            2. Parallel
            3. Applications
        III. Amplifiers and coupling
            A. Vacuum-tube amplifiers
              1. Operation
              2. Application
            B. Transistors amplifiers
              1. Bipolar
              2. FET (Field-effect transistors)
            C. Amplifier-coupling methods - compare
              1. Transformer/inductive
              2. Campacitive
              3. Direct
          IV. Overview of typical RF plasma systems
              A. Major functional blocks
              B. Diagrams
              C. Purpose of each block
            V. Plasma systems
                A. Glow discharge
                B. DC discharge
                C. RF discharge
                D. Plasma sheath
                  1. Creation
                  2. Control
              VI. Plasma applications and processes
                  A. Chemical vs. physical
                  B. CVD vs. PECVD
                  C. Sputter
                  D. Etch
                  E. RIE
                VII. Safety and dangers
                    A. Electric shock
                    B. Conditions
                      1. Shock
                      2. Electrocution
                    C. Safety precaution
                      1. Repairing
                      2. Maintaining
                  VIII. RF power supplies
                      A. Oscillators
                      B. RF amplifiers
                      C. Combiners
                      D. Control circuits
                    IX. Impedance-mathing networks
                        A. Purpose
                        B. Tuning configurations
                        C. L-type
                        D. Pl-type
                        E. Phase and magnitude considerations
                        F. Smith charts
                      X. RF measurements - techniques/instruments
                          A. Power types
                            1. Root-mean-square (RMS)
                            2. Average
                            3. Peak
                            4. Continuous-wave (CW)
                          B. Frequency
                          C. Harmonics
                        XI. Transmission lines - properties
                            A. Coaxial lines
                              1. Frequency
                              2. Power handling
                            B. Waveguides
                              1. Frequency
                              2. Power handling
                          XII. System troubleshooting and repair
                              A. System monitors
                              B. Fault isolation
                              C. Repair techniques
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