Maricopa Community Colleges  ELE286   20026-20086 
Official Course Description: MCCCD Approval: 07/22/08
ELE286 20026-20086 L+L 4 Credit(s) 6 Period(s)
Introduction to Monolithic Integrated Circuit Devices and Radio Frequency (RF) Plasma Technologies
Physics and electronics of bipolar and MOS devices used in integrated circuits. Overview of radio frequency (RF) plasma technologies. Laboratory experience in integrated circuit fabrication.
Prerequisites: AMS160.
Cross-References: SMT286
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MCCCD Official Course Competencies:
 
ELE286   20026-20086 Introduction to Monolithic Integrated Circuit Devices and Radio Frequency (RF) Plasma Technologies
1. Explain historical and current contexts for the principles and applications of integrated circuits. (I)
2. Work effectively in collaborative groups. (I, II, III)
3. Demonstrate appropriate semiconductor fabrication environment behavior in terms of safety, particle and defect reduction, and wafer handling. (I, II, III)
4. Fabricate functional integrated circuits. (II)
5. Measure oxide thickness, critical dimensions, and electrical characteristics of integrated circuits. (III)
6. Describe the major functional blocks of a plasma system. (IV)
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MCCCD Official Course Outline:
 
ELE286   20026-20086 Introduction to Monolithic Integrated Circuit Devices and Radio Frequency (RF) Plasma Technologies
    I. Introduction to Integrated Circuits
        A. Integrated circuit (IC) history
        B. IC applications
        C. Bipolar/MOS device physics
        D. IC fabrication process flow
      II. Integrated Circuit Fabrication
          A. Crystal growth and doping
          B. Oxidation
          C. Diffusion
          D. Epitaxy
          E. Ion implantation
          F. Metalization
          G. Photolithography
        III. Integrated Circuit Testing and Characterization
            A. Oxide thickness
            B. Critical dimensions
            C. Electrical characterization
          IV. Radio Frequency (RF) Plasma Overview
              A. Plasma physics
                1. Positive ions
                2. Electrons
                3. Fourth state of matter
              B. Functional blocks
                1. RF generator
                2. Transmission line
                  a. Oscillator
                  b. Amplifier
                  c. Combiners
                3. Impedance matching unit
                4. Chamber load
              C. RF safety
                1. Effect of high frequency on the human body
                2. Shock and electrocution
                3. Precautions
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