MCCCD Official Course Competencies:

AMS130  2002 Fall – 2012 Fall

Vacuum Technologies

1.

Describe the major types of vacuum systems. (I)

2.

Describe the characteristics of gases. (I)

3.

Explain the pressure units of vacuum and the conversion between units. (I)

4.

Explain how a residual gas analyzer operates. (I)

5.

Describe the operation of the three major types of vacuum pumps. (II)

6.

Perform preventive maintenance procedures on a roughing vacuum pump. (II)

7.

List the seven types of vacuum gauges and describe the operation and operating range for each type. (III)

8.

Install vacuum pumps and gauges. (II, III, IV)

9.

Assemble, operate, and troubleshoot a vacuum system. (IV)

MCCCD Official Course Outline:

AMS130  2002 Fall – 2012 Fall

Vacuum Technologies

I. Vacuum Systems Technology

A. Industry applications

1. Food processing

2. Semiconductor

3. Space research industries

4. Other

B. Types of vacuum systems

1. Diffusion pump system

2. Turbomolecular pump system

3. Cryopump system

4. Booster/blower system

5. Ion pump system

C. Fundamentals

1. Pressure

a. Pressure ranges

b. Pressure measurements

c. Effects of pressure

2. Characteristics of gases

a. Viscous flow

b. Molecular flow

c. Mean free path

d. Conductance

3. Units of vacuum

a. Torr

b. Pascal

c. Bar

d. Millimeters of mercury

e. Unit conversion

D. Residual gas analyzer

1. Components

a. Ion source

b. Quadruple mass filter

c. Faraday cup

2. Operation

E. Assembly principles

1. Safety practices

2. Materials

a. Copper

b. Ceramics

c. Kovar

d. Elastomers

3. Joining techniques

a. Flanges

b. Welding

c. Brazing

d. Glue

F. System component failures

1. Vacuum pumps

2. Valves

3. Control units

4. Gauges

G. System leaks

1. Types

a. Out gassing

b. Virtual

c. Water

d. Permeation

e. Real

2. Detection methods

a. Spark coil

b. Pressure change

c. Mass spectrometer

d. Leak detectors 1) Conventional design 2) Contra-flow design

II. Vacuum Pumps

A. Theory of operation

B. Types

1. Roughing pumps

a. Rotary piston

b. Rotary vane

c. Dry vacuum pump

d. Sorption pump

e. Venturi pump

f. Blower/buster pump

2. High vacuum pumps

a. Oil diffusion pump

b. Turbomolecular pump

c. Cryopump

3. Ultrahigh pumps

a. Titanium sublimation pump

b. Non-evaporable getter pump

c. Ion pump

C. Operating ranges

D. Preventative maintenance

III. Vacuum Gauges

A. Theory of operation

B. Types

1. Bourdon gauge

2. Capacitance manometer

3. Thermocouple gauge

4. Pirani gauge

5. Ionization gauge

6. Cold cathode gauge

7. McLeod gauge

8. Spinning rotor gauge

C. Operating ranges

IV. Vacuum System Assembly

A. Safety practices

B. Component installation

C. Operation

D. Troubleshooting

E. Preventative maintenance